[1] J. W. Song, J. S. Lee, J. E. An, C. G. Park, Design of a MEMS piezoresistive differential pressure sensor with small thermal hysteresis for air data modules, Review of Scientific Instruments, Vol. 86, 2015.
[2] C. L. Dai, Y. W. Tai, P. H. Kao, Modeling and fabrication of micro FET pressure sensor with circuits, Sensors, Vol. 7, pp. 3386-3398, 2007.
[3] K. Singh, R. Joyce, S. Varghese, J. Akhtar, Fabrication of electron beam physical vapor deposited polysilicon piezoresistive MEMS pressure sensor, Sensors and Actuators A: Physical, Vol. 223, pp. 151-158, 2015.
[4] R. Singh, L. L. Ngo, H. S. Seng, F. N. C. Mok, A silicon piezoresistive pressure sensor,Conference ProceedingsIEEE, pp. 181-184, 2002.
[5] S. Aravamudhan, S. Bhansali, Reinforced piezoresistive pressure sensor for ocean depth measurements, Sensors and Actuators A: Physical, Vol. 142, pp. 111-117, 2008.
[6] X. Li, Q. Liu, S. Pang, K. Xu, H. Tang, C. Sun, High-temperature piezoresistive pressure sensor based on implantation of oxygen into silicon wafer, Sensors and Actuators A: Physical, Vol. 179, pp. 277-282, 2012.
[7] S. E. Zhu, M. K. Ghatkesar, C. Zhang, G. C. A. M. Janssen, Graphene based piezoresistive pressure sensor, Applied Physics Letters, Vol. 102, 2013.
[8] S. M. Shaby, M. S. G. Premi, B. Martin, Enhancing the Performance of MEMS Piezoresistive Pressure Sensor Using Germanium Nanowire, Procedia Materials Science, Vol. 10, pp. 254-262, 2015.
[9] G. Zhou, Y. Zhao, F. Guo, W. Xu, A smart high accuracy silicon piezoresistive pressure sensor temperature compensation system, Sensors, Vol. 14, pp. 12174-12190, 2014.
[10] S. D. Senturia, Microsystem design, Springer Science & Business Media, 2007.
[11] W. O. Soboyejo, T. S. Srivatsan, Advanced Structural Materials: Properties, Design Optimization, and Applications, CRC press, 2006.
[12] D. H. Alsem, O. N. Pierron, E. A. Stach, C. L. Muhlstein, R. O. Ritchie, Mechanisms for Fatigue of Micron‐Scale Silicon Structural Films, Advanced Engineering Materials, Vol. 9, pp. 15-30, 2007.